Cast-In Semiconductor Manufacturing Heaters

We are at the forefront of the industry, addressing the challenges of stringent operating parameters and high quality requirements faced by original equipment manufacturers specializing in the semiconductor, wave solder and reflow surface mount processes. By employing state-of-the-art technologies and by utilizing our acquired knowledge as a company, we have met the challenges by offering and delivering excellence in the design, engineering and manufacturing of a complete selection of innovative, reliable and high quality cast-in aluminum thermal component products.

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Cast-In Thermal Platens for Wave Solder & Reflow Surface Mount Equipment

Tempco’s highly engineered platens are capable of maintaining a temperature gradient of 5°F (2.77°C) across the entire working surface of the heater platen at the process operating temperature. The innovative design of this cast-in thermal platen incorporates the dual functions of being both a radiant and a convection heat source.

Cast-In Heaters for Wafer Processing

Tempo offers a complete selection of highly customized semi-conductor process heaters which include:

Pedestal Heaters
Pedestal Heaters with Integrated Cooling Capabilities
Bake Platen Heaters
High-Temperature Platen Heaters with Interference Press Fit Tubular or Cable Heating Elements.

For this type of platen heater construction, the available base alloys are:

Aluminum
Brass
Bronze

Design Features:

Casting Maximum Surface Temperatures
- Aluminum Alloy 319: 700°F (371°C)
- Aluminum Alloy 356: 750°F (399°C)
Interference Press Fit Construction – maximum surface temperature depends on base alloy used
Surface Finish – Hard-Coat Anodized
Built-in Temperature Sensors ✴ Selection of heating element and cooling tube terminations

Cast-In Heater for Wafer Processing

In order to satisfy the stringent requirements of the industry, these products are manufactured under rigid quality control standards. Specific attention is directed to the heating element design and the casting processes. Our metallurgical knowledge and foundry expertise are the catalyst for producing cast-in heaters with the precise heat profiles and temperature gradient required for the process.

Tempco’s state-of-the-art CNC machining capabilities will ensure that the working surface requirements of the part are precisely machined to customer requirements, including extremely flat surfaces, to within 0.0005 in (0.0127 mm) for optimizing the performance of the application.

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Cast-In Heaters for semiconductor processing are made to customer specifications. For technical assistance, engineering data and available options please refer to Tempco's Cast-In Heater Specifications and Tolerances. When ordering, please provide detailed design drawings including dimensions, critical tolerances, watts, volts and any other features or special specifications.